微机电系统磁流体压力微传感器

作者： 日期：2007-05-08/span> 浏览：4444 查看PDF文档

                         微机电系统磁流体压力微传感器
                              徐军民，王瑞金，杨娅君
                （浙江科技学院 机械与汽车工程学院，浙江 杭州 310012）

摘 要：由于磁流体具有磁性，如果在磁场作用下力的平衡发生变化，会因磁流体的流动而产生压力。将这种现象用到微系统中，可以获得1~1 000 mbar数量级的压力值。在试验装置中，用压阻式压力传感器得到了40 mbar的压力。试验结果表明，磁流体和微系统的结合具有很大的潜能，为其应用于新的场合提供了研究基础。
关键词：微机电系统；磁流体；微致动器；磁压；微压力传感器

                   Pressure microsensor with magnetic fluid in MEMS
                              XU Junmin, WANG Ruijin, YANG Yajun
（College of Mechanical and Automobile Engineering, Zhejiang University of Science and Technology, Hangzhou 310012, China）

Abstract: Magnetic fluid is fluid with magnetic properties. By applying a magnetic field, the balance of forces within the magnetic fluid is varied so that the magnetic fluid can move or apply pressure. These capabilities can be used in the field of the microsystems. The typical pressure values of order of 1~1 000 mbar was expected from magnetic fluid. Using a piezoresistive pressure sensor, a pressure of 40 mbar was obtained in the experimental setup. The results of the preliminary experiment show a high potential in combining both magnetic fluid and microsystems and therefore, further research is under development for new applications.
Key words: micro electromechanical system(MEMS); magnetic fluid; microactuator; magnetic pressure; micropressure sensors

参考文献：
［1］POPA N C, POTENCZ I, BROSTEAN L. Some applications of inductive transducers with magnetic liquids［J］. Sensors and Actuators A,1997,5（9）:197-200.
［2］ROBERT J L, TOSHIHIKO T. Ultrahigh resolution separation comes of age［J］. Science，2002,29（8）:1441-1443.
［3］MELVIN K, LIU C. Ferrofluidbased microchip pump and valve［J］. Sensors and Actuators B,2004，9（9）:592-600.
［4］王瑞金，林小禾,林建忠.自装配磁性微混合器及其混合性能研究［J］.功能材料,2006,36(5):989-991.
［5］王瑞金,楼少敏.微机电系统中的磁流体微泵［J］.功能材料与器件学报,2006,12(3):251-255.
［6］SUZUKI H, HO C M. A magnetic force driven chaotic micromixer［C］. 15th Int. Conf. on Micro Electro Mechanical Systems,2002,MEMS’02,Las Vegas,NV,2002:40-43.
［7］王瑞金．磁流体技术的应用与发展［J］．新技术新工艺，2001,(10):15-18.
［8］CHRISTOPHE Y. Plastic micropump with ferrofluidic actuation［J］. MEMS,2005,14(1):96-102.
［9］KHOO M, LIU C. A novel micromachined magnetic membrane microfluid pump［C］. Proceeding of 22nd Annual EMBS International Conference,2000:2394-2397.
［10］ZHANG W, AHN C H. A bidirectional magnetic micropump on a silicon wafer［J］.1996 Solidstate Sensor and Actuator Workshop,1996,（7）:94-97.