超精密定位平台的测量系统研究

作者：王文，李欣欣 日期：2006-12-28/span> 浏览：3573 查看PDF文档

超精密定位平台的测量系统研究

王文，李欣欣
(浙江大学 现代制造工程研究所，浙江 杭州 310027)

摘要：超精密工作平台已经成为IC和MEMS等行业完成加工、测量工作的基本设备平台。如何提高平台测量系统的精度，从而提高平台的定位精度是目前超精密工作平台所面临的一大难题。对现有的超精密工作平台的基本结构以及常见的精密测量系统进行了综合分析，详细介绍了一种新型的测量装置——平面编码器的工作原理。
关键词：超精密平台;测量系统;平面编码器
中图分类号：TP274+.5文献标识码：A文章编号：1001-4551(2006)04-0013-05

Study on Measurement System of Ultra|precision Positioner
WANG Wen, LI Xin|xin
(Institute of Advanced Manufacture Engineering, Zhejiang University, Hangzhou 310027, China)
Abstract:  As the rapid development of IC and MEMS industries, ultra|precision positioner has become a fundamental equipment for their applications. It has been a big challenge to improve the measurement accuracy and the positioning accuracy of positioner.  A brief introduction is given to the scheme of ultra|precision positioner and common measuring systems of it, and a new measuring device|surface encoder (2D encoder) is narrated in details. 
Key words:  ultra|precision positioner; measurement system; surface encoder
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