雷尼绍与多普勒激光干涉仪测量方法比较

作者：郭然 日期：2006-12-27/span> 浏览：4542 查看PDF文档

雷尼绍与多普勒激光干涉仪测量方法比较

郭然
(衢州市广播电视大学，浙江 衢州 324000)

摘要：介绍了雷尼绍激光干涉仪和多普勒激光干涉仪的测量原理，并对这两种激光干涉仪的测量方法进行了比较。结果表明，当只需要测量机床的线性定位精度时，两者都比较适合。当需要测量机床的所有几何误差时，由于多普勒激光干涉仪采用了激光向量技术，测量周期大大缩短，测量效率较高。
关键词：数控机床；误差检测；激光干涉仪
中图分类号：TP206.1文献标识码：A文章编号：1001-4551(2006)09-0053-03

Comparison of the measurement methods between renishaw and doppler laser interferometer
GUO Ran
(TV Broadcasting University of Quzhou, Quzhou 324000, China)
Abstract: The measurement principle of Renishaw laser interferometer and Doppler laser interferometer were introduced. The two measurement methods was compared. It shows that the measurement methods are adapted when the linear positional errors only are measured. Because Doppler laser interferometer adopts the laser vector measurement technique, its measurement time was decreased and efficiency is high when all errors must be measured.
Key words: CNC machine tools; errors measurement; laser interferometer
参考文献：
［1］AUTHONY C O, YALCIN M E. Vertical machining center accuracy characterization using laser interferometer Part I［J］. Linear Positional Errors,2000,10（5):394-406.
［2］王正平.用激光向量测量技术测量和补偿体积定位误差［J］。计量技术，2001，（10）：10-13.
［3］WANG C. Laser Vector measurement Technique for the determination and compensation of volumetric positioning errors［J］. Part I: Basic theory, Review of Scientific Instruments,2000,71(10):3933-3937.
［4］钟振同，叶赐旭，梁瑞芳，等.精密机械空间误差测量与补偿［M］。台北：全华科技图书股份有限公司，1991.